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Visualization of vacancy type defects in the RP/2 region of ion implanted and annealed silicon

✍ Scribed by A. Peeva; R. Koegler; W. Skorupa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Metallic impurity gettering to defects r

✍ A Peeva; R Koegler; G Brauer; P Werner; W Skorupa 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Oxygen-related vacancy-type defects in i

✍ Pi, X D; Burrows, C P; Coleman, P G; Gwilliam, R M; Sealy, B J 📂 Article 📅 2003 🏛 Institute of Physics 🌐 English ⚖ 206 KB

Spatial distribution of defects in ion-i

✍ R Kögler; R.A Yankov; J.R Kaschny; M Posselt; A.B Danilin; W Skorupa 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 326 KB

Alternating layers of vacancy-type and i

✍ Kogler, R.; Peeva, A.; Mucklich, A.; Eichhorn, F.; Skorupa, W. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 632 KB

Evidence for interstitial-type defects i

✍ A Peeva; R Kögler; P Werner; A.A.D de Mattos; P.F.P Fichtner; M Behar; W Skorupa 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 165 KB

Prevention of impurity gettering in the

✍ R. Kögler; A. Peeva; J. Kaschny; W. Skorupa; H. Hutter 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 120 KB