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Oxygen-related vacancy-type defects in ion-implanted silicon

✍ Scribed by Pi, X D; Burrows, C P; Coleman, P G; Gwilliam, R M; Sealy, B J

Book ID: 111858077
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 206 KB
Volume: 15
Category: Article
ISSN: 0953-8984
DOI: 10.1088/0953-8984/15/39/007

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