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Interstitial type defects in ion implanted silicon

✍ Scribed by Berezhnov, N. I. ;Stelmakh, V. F. ;Chelyadinskii, A. R.

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 245 KB
Volume: 78
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210780254

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