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Alternating layers of vacancy-type and interstitial-type defects in Ge ion implanted silicon

โœ Scribed by Kogler, R.; Peeva, A.; Mucklich, A.; Eichhorn, F.; Skorupa, W.


Book ID
118127851
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
632 KB
Volume
88
Category
Article
ISSN
0003-6951

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