Metallic impurity gettering to defects remaining in the RP/2 region of MeV-ion implanted and annealed silicon

✍ Scribed by A Peeva; R Koegler; G Brauer; P Werner; W Skorupa

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 293 KB
• Volume: 3
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(00)00047-0