✦ LIBER ✦
The regrowth and impurity diffusion processes in the arc annealing of ion-implanted silicon: Juh-Tzeng Lue and Chen-Chung Chao, J Appl Phys, 53 (2), 1982, 984–987
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 176 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.