✦ LIBER ✦

Prevention of impurity gettering in the RP/2 region of ion-implanted silicon by defect engineering

✍ Scribed by R. Kögler; A. Peeva; J. Kaschny; W. Skorupa; H. Hutter

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Metallic impurity gettering to defects r

✍ A Peeva; R Koegler; G Brauer; P Werner; W Skorupa 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Simulation of metallic impurity getterin

✍ R.A. Brown; O. Kononchuk; G.A. Rozgonyi 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 173 KB

Visualization of vacancy type defects in

✍ A. Peeva; R. Koegler; W. Skorupa 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 178 KB

Evidence for interstitial-type defects i

✍ A Peeva; R Kögler; P Werner; A.A.D de Mattos; P.F.P Fichtner; M Behar; W Skorupa 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 165 KB

The gettering of boron by an ion-implant

✍ Richard B. Fair; Paul N. Pappas 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 268 KB

Comparison of impurity defect structures

✍ G. Weyer; S. Damgaard; J.W. Petersen; J. Heinemeier 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 267 KB