✦ LIBER ✦

The gettering of boron by an ion-implanted antimony layer in silicon

✍ Scribed by Richard B. Fair; Paul N. Pappas

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The gettering of boron by an ion-implant

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 59 KB

Structure and annealing properties of si

✍ Tadamasa Kimura; Shigeru Kagiyama; Shigemi Yugo 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 683 KB

Experimental method for measuring both a

✍ Masaya Iwaki; Kenji Gamo; Kohzo Masuda; Susumu Namba; Shinji Ishihara; Itsuro Ki 📂 Article 📅 1975 🏛 Elsevier Science ⚖ 436 KB

The formation of buried Si3N4 layers in

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

The determination of low dose boron impl

✍ K. Müller; R. Henkelmann; H. Boroffka 📂 Article 📅 1975 🏛 Elsevier Science ⚖ 229 KB

Theoretical estimates of the sheet resis

✍ L.M. Scarfone; J.D. Chlipala 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 891 KB