✦ LIBER ✦
Experimental method for measuring both atom and carrier concentration profiles in the same sample of ion-implanted silicon layers by radioactive-ion implantation
✍ Scribed by Masaya Iwaki; Kenji Gamo; Kohzo Masuda; Susumu Namba; Shinji Ishihara; Itsuro Kimura; Katsuhiro Yokota
- Publisher
- Elsevier Science
- Year
- 1975
- Weight
- 436 KB
- Volume
- 127
- Category
- Article
- ISSN
- 0029-554X
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