Theoretical estimates of the sheet resistance of Gaussian n-type ion-implanted layers in semiconductors: Phosphorus in silicon

✍ Scribed by L.M. Scarfone; J.D. Chlipala

• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 891 KB
• Volume: 22
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(79)90018-2