Theoretical estimates of the sheet resistance of Gaussian n-type ion-implanted layers in semiconductors: phosphorus in silicon: L. M. Scarfone and J. D. Chlipala. Solid-St. Electron.22, 559 (1979)

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 129 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90370-4