✦ LIBER ✦

Understanding and Modeling the Resistance of High Aspect Ratio FIB-Fabricated Tungsten Vias

✍ Scribed by David W. Niles; Walter Dauksher; Ronald W. Kee

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of damage induced by FI

✍ Drezner, Yariv ;Fishman, Daniel ;Greenzweig, Yuval ;Raveh, Amir 📂 Article 📅 2011 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 966 KB

Thermal nanoimprint resist for the fabri

✍ Messerschmidt, M.; Schleunitz, A.; Spreu, C.; Werner, T.; Vogler, M.; Reuther, F 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 432 KB

Theory of Filling of High-Aspect Ratio T

✍ West, Alan C. 📂 Article 📅 2000 🏛 The Electrochemical Society 🌐 English ⚖ 215 KB

Fabrication of photoplastic high-aspect

✍ H. Lorenz; M. Despont; P. Vettiger; P. Renaud 📂 Article 📅 1998 🏛 Springer-Verlag 🌐 English ⚖ 615 KB

Design, modeling, fabrication and testin

✍ Joudrey, Kurt; Adams, George G; McGruer, Nicol E 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 558 KB

Proton beam writing and electroplating f

✍ Weisheng Yue; Yaping Ren; Jeroen Anton van Kan; Sher-Yi Chiam; Linke Jian; Herbe 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 471 KB