Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

✍ Scribed by Weisheng Yue; Yaping Ren; Jeroen Anton van Kan; Sher-Yi Chiam; Linke Jian; Herbert O. Moser; Thomas Osipowicz; Frank Watt

• Book ID: 118492108
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 471 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.03.103