Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive X-ray optics fabrication

✍ Scribed by Sergey Gorelick; Joan Vila-Comamala; Vitaliy Guzenko; Rajmund Mokso; Marco Stampanoni; Christian David

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 475 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.091