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Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing

✍ Scribed by Y. Seki; Y. Furuta; H. Nishikawa; T. Watanabe; T. Nakata; T. Satoh; Y. Ishii; T. Kamiya

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 470 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.01.013

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