✦ LIBER ✦
High aspect ratio micro/nano machining with proton beam writing on aqueous developable – easily stripped negative chemically-amplified resists
✍ Scribed by M. Chatzichristidi; E. Valamontes; P. Argitis; I. Raptis; J.A. van Kan; F. Zhang; F. Watt
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 349 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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