Applications of microstructures fabricated by proton beam writing to electric-micro filters

✍ Scribed by Yusuke Furuta; Hiroyuki Nishikawa; Takahiro Satoh; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 923 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.03.037

✦ Synopsis

Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of $20 lm and a diameter of $1 lm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.