Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirror

✍ Scribed by Joudrey, Kurt; Adams, George G; McGruer, Nicol E

• Book ID: 120710171
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 558 KB
• Volume: 16
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/16/10/031