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Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor

✍ Scribed by Aebersold, J; Walsh, K; Crain, M; Voor, M; Martin, M; Hnat, W; Lin, J; Jackson, D; Naber, J

Book ID: 121000439
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 855 KB
Volume: 34
Category: Article
ISSN: 1742-6588
DOI: 10.1088/1742-6596/34/1/021

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