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Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

✍ Scribed by Majlis, Burhanuddin Yeop

Book ID: 120257592
Publisher: The International Society for Optical Engineering
Year: 2009
Tongue: English
Weight: 896 KB
Volume: 8
Category: Article
ISSN: 1932-5150
DOI: 10.1117/1.3091941

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