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High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm

✍ Scribed by Bahram Azizollah Ganji; Burhanuddin Yeop Majlis; SMIEEE

Book ID: 106185776
Publisher: Springer-Verlag
Year: 2009
Tongue: English
Weight: 344 KB
Volume: 15
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-009-0902-6

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