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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A high sensitivity polysilicon diaphragm condenser microphone

✍ Scribed by Hsu, P.-C.; Klastrangelo, C.H.; Wise, K.D.

Book ID: 118185072
Publisher: IEEE
Year: 1998
Weight: 1004 KB
Volume: 0
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/memsys.1998.659822

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