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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Micromachined accelerometer based on convection heat transfer

✍ Scribed by Leung, A.M.; Jones, J.; Czyzewska, E.; Chen, J.; Woods, B.

Book ID: 118118573
Publisher: IEEE
Year: 1998
Weight: 732 KB
Volume: 0
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/memsys.1998.659830

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