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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases

✍ Scribed by Linnemann, R.; Woias, P.; Senfft, C.-D.; Ditterich, J.A.

Book ID: 111676734
Publisher: IEEE
Year: 1998
Weight: 648 KB
Volume: 0
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/memsys.1998.659814

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