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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm

✍ Scribed by Huang, Chien-Hsin; Tsai, Ming-Han; Lee, Chien-Hsing; Hsieh, Tsung-Min; Liou, Jhyy-Cheng; Chen, Li-Che; Yip, Ming-Chuen; Fang, Weileun

Book ID: 121869608
Publisher: IEEE
Year: 2011
Weight: 960 KB
Category: Article
ISBN: 145770157X
DOI: 10.1109/TRANSDUCERS.2011.5969162

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