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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Planar MEMS RF capacitor integration

✍ Scribed by Stamper, A. K.; Jahnes, C. V.; Dupuis, S. R.; Gupta, A.; He, Z.-X.; Herrin, R. T.; Luce, S. E.; Maling, J.; Miga, D. R.; Murphy, W. J.; White, E. J.; Cunningham, S. J.; DeReus, D. R.; Vitomirov, I.; Morris, A. S.

Book ID: 118240456
Publisher: IEEE
Year: 2011
Weight: 694 KB
Volume: 0
Category: Article
ISBN: 145770157X
DOI: 10.1109/transducers.2011.5969479

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