𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Design and fabrication of a novel integrated floating-electrode-"electret"-microphone (FFEM)

✍ Scribed by Zou, Q.B.; Tan, Z.M.; Wang, Z.F.; Lim, M.K.; Lin, R.M.; Yi, S.; Li, Z.J.

Book ID: 126268274
Publisher: IEEE
Year: 1998
Weight: 714 KB
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/MEMSYS.1998.659823

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Laser display technology

✍ Kranert, J.; Deter, C.; Gessner, T.; Dotzel, W. 📂 Article 📅 1998 🏛 IEEE ⚖ 963 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Miniature one-shot valve

✍ Guerin, L.J.; Dubochet, O.; Zeberli, J.-F.; Clot, P.; Renaud, P. 📂 Article 📅 1998 🏛 IEEE ⚖ 801 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Contact materials for microrelays

✍ Schimkat, J. 📂 Article 📅 1998 🏛 IEEE ⚖ 389 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A new basic technology for magnetic micro-actuators

✍ Fullin, E.; Gobet, J.; Tilmans, H.A.C.; Bergqvist, J. 📂 Article 📅 1998 🏛 IEEE ⚖ 738 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A high sensitivity polysilicon diaphragm condenser microphone

✍ Hsu, P.-C.; Klastrangelo, C.H.; Wise, K.D. 📂 Article 📅 1998 🏛 IEEE ⚖ 1004 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Fabrication of microstructures using aluminum anodization techniques

✍ Nadeem, A.; Mescher, M.; Rebello, K.; Weiss, L.E.; Wu, C.; Feldman, M.; Reed, M. 📂 Article 📅 1998 🏛 IEEE ⚖ 650 KB