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Design and development of a MEMS capacitive bending strain sensor

✍ Scribed by Aebersold, J; Walsh, K; Crain, M; Martin, M; Voor, M; Lin, J-T; Jackson, D; Hnat, W; Naber, J

Book ID: 120278044
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 992 KB
Volume: 16
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/16/5/009

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