On the modeling of a MEMS-based capaciti
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Ghader Rezazadeh; Amin Lotfiani; Shahram Khalilarya
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Article
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2009
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Elsevier Science
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English
⚖ 217 KB
In this paper, a microcapacitive wall shear stress sensor for the measurement of skin friction is developed. The design objective is to measure wall shear stress in the range of 1.25-2.45 kPa in laminar boundary layers. Mechanical behavior of the sensing elements, capacitive variations, and sensor's