✦ LIBER ✦
Characterization of damage induced by FIB etch and tungsten deposition in high aspect ratio vias
✍ Scribed by Drezner, Yariv ;Fishman, Daniel ;Greenzweig, Yuval ;Raveh, Amir
- Book ID
- 124159035
- Publisher
- AVS (American Vacuum Society)
- Year
- 2011
- Tongue
- English
- Weight
- 966 KB
- Volume
- 29
- Category
- Article
- ISSN
- 1520-8567
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