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Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

โœ Scribed by H. Lorenz; M. Despont; P. Vettiger; P. Renaud


Publisher
Springer-Verlag
Year
1998
Tongue
English
Weight
615 KB
Volume
4
Category
Article
ISSN
0946-7076

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