✦ LIBER ✦
Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process
✍ Scribed by A. Schneider; B. Su; T. W. Button; L. Singleton; O. Wilhelmi; S. E. Huq; P. D. Prewett; R. A. Lawes
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 139 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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