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Ultrahigh x-ray reflectivity from W∕Al[sub 2]O[sub 3] multilayers fabricated using atomic layer deposition

✍ Scribed by Fabreguette, Francois H.; Wind, Rikard A.; George, Steven M.

Book ID: 126058839
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 336 KB
Volume: 88
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2161117

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