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Properties of ZnO/Al[sub 2]O[sub 3] Alloy Films Grown Using Atomic Layer Deposition Techniques

✍ Scribed by Elam, J. W.; Routkevitch, D.; George, S. M.

Book ID: 125842968
Publisher: The Electrochemical Society
Year: 2003
Tongue: English
Weight: 421 KB
Volume: 150
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1569481

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