✦ LIBER ✦

Gas diffusion barriers on polymers using Al[sub 2]O[sub 3] atomic layer deposition

✍ Scribed by M. D. Groner; S. M. George; R. S. Mclean; P. F. Carcia

Book ID: 123607683
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 259 KB
Volume: 88
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2168489

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma-assisted atomic layer deposition

Plasma-assisted atomic layer deposition of Al[sub 2]O[sub 3] moisture permeation barriers on polymers

✍ Langereis, E.; Creatore, M.; Heil, S. B. S.; van de Sanden, M. C. M.; Kessels, W 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 307 KB

Gas Diffusion Barriers on Polymers Using

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition

✍ Dameron, A.A.; Davidson, S.D.; Burton, B.B.; Carcia, P.F.; McLean, R.S.; George, 📂 Article 📅 2008 🏛 American Chemical Society 🌐 English ⚖ 240 KB

Transport mechanisms in atomic-layer-dep

Transport mechanisms in atomic-layer-deposited Al[sub 2]O[sub 3] dielectrics

✍ Specht, M.; StaÌdele, M.; Jakschik, S.; SchroÌder, U. 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 313 KB

Silicon surface passivation by atomic la

Silicon surface passivation by atomic layer deposited Al[sub 2]O[sub 3]

✍ Hoex, B.; Schmidt, J.; Pohl, P.; van de Sanden, M. C. M.; Kessels, W. M. M. 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 1006 KB

Diffusion Barrier Properties of Atomic L

Diffusion Barrier Properties of Atomic Layer Deposited Ultrathin Ta[sub 2]O[sub 5] and TiO[sub 2] Films

✍ Alén, Petra; Vehkamäki, Marko; Ritala, Mikko; Leskelä, Markku 📂 Article 📅 2006 🏛 The Electrochemical Society 🌐 English ⚖ 396 KB

Conformal Al[sub 2]O[sub 3] dielectric l

Conformal Al[sub 2]O[sub 3] dielectric layer deposited by atomic layer deposition for graphene-based nanoelectronics

✍ Lee, Bongki; Park, Seong-Yong; Kim, Hyun-Chul; Cho, KyeongJae; Vogel, Eric M.; K 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 505 KB