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Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition

✍ Scribed by Dameron, A.A.; Davidson, S.D.; Burton, B.B.; Carcia, P.F.; McLean, R.S.; George, S.M.

Book ID: 121740867
Publisher: American Chemical Society
Year: 2008
Tongue: English
Weight: 240 KB
Volume: 112
Category: Article
ISSN: 1932-7447
DOI: 10.1021/jp076866+

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