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Transport mechanisms in atomic-layer-deposited Al[sub 2]O[sub 3] dielectrics

✍ Scribed by Specht, M.; StaÌdele, M.; Jakschik, S.; SchroÌder, U.

Book ID: 121348669
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 313 KB
Volume: 84
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1703840

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