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Diffusion Barrier Properties of Atomic Layer Deposited Ultrathin Ta[sub 2]O[sub 5] and TiO[sub 2] Films

✍ Scribed by Alén, Petra; Vehkamäki, Marko; Ritala, Mikko; Leskelä, Markku


Book ID
118010525
Publisher
The Electrochemical Society
Year
2006
Tongue
English
Weight
396 KB
Volume
153
Category
Article
ISSN
0013-4651

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