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Properties of atomic layer deposited (Ta[sub 1âx]Nb[sub x])[sub 2]O[sub 5] solid solution films and Ta[sub 2]O[sub 5]âNb[sub 2]O[sub 5] nanolaminates

✍ Scribed by Kukli, Kaupo; Ritala, Mikko; LeskelaÌ, Markku

Book ID: 121339062
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 292 KB
Volume: 86
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.371576

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Properties of atomic layer deposited (Ta[sub 1âx]Nb[sub x])[sub 2]O[sub 5] solid solution films and Ta[sub 2]O[sub 5]âNb[sub 2]O[sub 5] nanolaminates

Properties of atomic layer deposited (Ta[sub 1âx]Nb[sub x])[sub 2]O[sub 5] solid solution films and Ta[sub 2]O[sub 5]âNb[sub 2]O[sub 5] nanolaminates