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TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2] Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition

✍ Scribed by Jeon, Woojin; Chung, Hoi-Sung; Joo, Daekwon; Kang, Sang-Won

No coin nor oath required. For personal study only.

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