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Impact of O[sub 3] feeding time on TiO[sub 2] films grown by atomic layer deposition for memory capacitor applications

✍ Scribed by Kim, Seong Keun; Lee, Sang Young; Seo, Minha; Choi, Gyu-Jin; Hwang, Cheol Seong

Book ID: 120445076
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 835 KB
Volume: 102
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2757008

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