✦ LIBER ✦
High dielectric constant TiO[sub 2] thin films on a Ru electrode grown at 250 °C by atomic-layer deposition
✍ Scribed by Kim, Seong Keun; Kim, Wan-Don; Kim, Kyung-Min; Hwang, Cheol Seong; Jeong, Jaehack
- Book ID
- 121800642
- Publisher
- American Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 296 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0003-6951
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