High-κ HfO[sub 2] Nanocrystal Memory Capacitors Prepared by Phase Separation of Atomic-Layer-Deposited HfO[sub 2]∕Al[sub 2]O[sub 3] Nanomixtures

✍ Scribed by Maikap, S.; Das, Atanu; Wang, T.-Y.; Tien, T.-C.; Chang, L.-B.

• Book ID: 118266190
• Publisher: The Electrochemical Society
• Year: 2009
• Tongue: English
• Weight: 862 KB
• Volume: 156
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.3070660