SrTa[sub 2]O[sub 6] thin films for high-K dielectric applications grown by chemical vapor deposition on different substrates

✍ Scribed by Regnery, Stephan; Thomas, Reji; Ehrhart, Peter; Waser, Rainer

• Book ID: 120042175
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 938 KB
• Volume: 97
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1873033