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Plasma-assisted atomic layer deposition of Al[sub 2]O[sub 3] moisture permeation barriers on polymers

✍ Scribed by Langereis, E.; Creatore, M.; Heil, S. B. S.; van de Sanden, M. C. M.; Kessels, W. M. M.

Book ID: 120412315
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 307 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2338776

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