Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers

✍ Scribed by Langereis, E. (author);Creatore, M. (author);Heil, S. B.S. (author);Van De Sanden, M. C.M. (author);Kessels, W. M.M. (author)

• Book ID: 120412316
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 307 KB
• Volume: 89
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2338776