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Nucleation and Growth during Al 2 O 3 Atomic Layer Deposition on Polymers

✍ Scribed by Wilson, C. A.; Grubbs, R. K.; George, S. M.

Book ID: 120412136
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 546 KB
Volume: 17
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm050704d

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