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Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al 2 O 3 Thin Films

✍ Scribed by Xiong, Yuqing; Sang, Lijun; Chen, Qiang; Yang, Lizhen; Wang, Zhengduo; Liu, Zhongwei

Book ID: 121371581
Publisher: IOP Publishing
Year: 2013
Tongue: English
Weight: 643 KB
Volume: 15
Category: Article
ISSN: 1009-0630
DOI: 10.1088/1009-0630/15/1/09

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