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Frenkel-Poole trap energy extraction of atomic layer deposited Al[sub 2]O[sub 3] and Hf[sub x]Al[sub y]O thin films

✍ Scribed by Yeh, Chun-Chen; Ma, T. P.; Ramaswamy, Nirmal; Rocklein, Noel; Gealy, Dan; Graettinger, Thomas; Min, Kyu

Book ID: 121348676
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 571 KB
Volume: 91
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2786021

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