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Evolution of crystallographic ordering in Hf[sub 1âx]Al[sub x]O[sub y] high-Îº dielectric deposited by atomic layer deposition

✍ Scribed by Wiemer, C.; Fanciulli, M.; Crivelli, B.; Pavia, G.; Alessandri, M.

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Evolution of crystallographic ordering in Hf[sub 1âx]Al[sub x]O[sub y] high-Îº dielectric deposited by atomic layer deposition